Optical Microscanners and Microspectrometers Using Thermal Bimorph Actuators - Hardback - 2002

Shows how to design and fabricate optical microsystems using technologies and original architectures. This work explains a barcode scanner, laser projection mirror and a microspectrometer, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, and device test to the system assembly.
Year of publication: 2002
Pagination: 268 pages, biography
Format: Hardback
Serie: Microsystems