Micromachined Ultrasound-based Proximity Sensors - Hardback - 1999

Presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. This title describes the characterization, optimization and the long-term stability of silicon membrane resonators as well as appropriate packaging for ultrasound microsystems.
Year of publication: 1999
Pagination: 121 pages, biography
Format: Hardback
Serie: Microsystems