Ion Implantation - Basics to Device Fabrication - Hardback - 1994

A collection of research dealing with several aspects of ion implantation, including basic information on the physics of devices, ion implanters, channeling implants, yield, damage and its annealing, in addition to a host of other topics.
Year of publication: 1994
Pagination: 406 pages, biography
Format: Hardback
Serie: The Springer International Series in Engineering and Computer Science