Electrical Characterization of Silicon-on-insulator Materials and Devices - Hardback - 1995

Describes a variety of electrical characterization methods, from wafer screening and defect identification to detailed device evaluation. This book provides a comprehensive treatment of different aspects of SOI technologies, including material synthesis, device physics, characterization, circuit applications, and reliability issues.
Year of publication: 1995
Pagination: 396 pages, biography
Format: Hardback
Serie: The Springer International Series in Engineering and Computer Science