CMOS Cantilever Sensor Systems - Atomic-force Microscopy and Gas Sensing Applications - Hardback - 2002

This is an introduction to the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers allow the sensitive detection of physical quantities such as forces and mass changes.
Year of publication: 2002
Pagination: 142 pages, biography
Format: Hardback
Serie: Microtechnology and MEMS